Rudolph Auto EL III Ellipsometer, University of Cincinnati. General Information. Equipment Name: Rudolph Auto EL III Ellipsometer. Location: 3. 61 ERCMax Wafer Size: 6. It is a highly accurate and repeatable measurement. Ellipsometry involves illuminating the surface of a sample with a monochromatic laser light having a known and controllable state of polarization and analyzing the polarization state of the reflected light. The Auto EL III is designed to provide precision film thickness measurements with simplicity of use. Internal data reduction software offers the convenience of automatically transforming delta and psi into the physical properties of thickness and refractive index. Capabilities: Operating Wavelength: 6. The Rudolph Ellipsometer is a version of the AutoEL II Automatic Ellipsometer (Model A9822). It is capable of performing ellipsometric measurements at three. Resolution and Accuracy: Polarizer or analyzer 0.
Rudolph AutoEL II Ellipsometer consisting of: - Rudolph AutoEL II Main System - Sample stage with vertical and tilt adjustments - Autocollimator with microspot objective. Operation Manual of Ellipsometer Updated June 7, 2006 I. Description Ellipsometer measures thickness of films. A laser beam is shined, reflected on a sample and. Rudolph Research Auto EL III Ellipsometer. Manufacturer: Rudolph; Model: Auto EL III; Product Code: 164019; Used Rudolph Research Auto EL III Ellipsometer with manual.
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